Etching of the surface with a reactive process gas. Material is removed, vaporized andsucked off. Therefore the surface area is enlarged.
Applications of plasma etching:
- e.g. structuring of silicon
- Good adhesion of finish and glue on high temperature resistive plastics like PTFE, PFA and FEP
- Structuring of Silicon
- Etching of PTFE
- For adhesion with paint and glue on plastics resistant to high temperatures, ie. PTFE, PFA, FEP
- Photoresist ashing