Etching of the surface with a reactive process gas. Material is removed, vaporized andsucked off. Therefore the surface area is enlarged.

Applications of plasma etching:

  • e.g. structuring of silicon
  • Good adhesion of finish and glue on high temperature resistive plastics like PTFE, PFA and FEP


  • Structuring of Silicon
  • Etching of PTFE
  • For adhesion with paint and glue on plastics resistant to high temperatures, ie. PTFE, PFA, FEP
  • Photoresist ashing

Industrial Application of Plasma

One of the latest trends Aurica has been working on is research in the field of plasma surface treatment. Industrial use of plasma is a quickly developing and promising area of scientific and technical studies. Plasma is “the fourth state of matter”, ionized gas obtained


Ion bombardment cleans surfaces physically (sputtering) and, depending on the gas, also chemically. The contamination is vaporized and sucked away. Applications of plasma cleaning: Removing grease, oil, oxides or silicone Pre-treatment and preparation for bonding, soldering or gluing Pre-treatment for finishing metals Applications: Removal of