Etching

Etching of the surface with a reactive process gas. Material is removed, vaporized andsucked off. Therefore the surface area is enlarged.

Applications of plasma etching:

  • e.g. structuring of silicon
  • Good adhesion of finish and glue on high temperature resistive plastics like PTFE, PFA and FEP

Applications:

  • Structuring of Silicon
  • Etching of PTFE
  • For adhesion with paint and glue on plastics resistant to high temperatures, ie. PTFE, PFA, FEP
  • Photoresist ashing

 


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